Browsing Journal Articles by Subject "Tantalum"

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Extension of the lifetime of tantalum filaments in the hot-wire (Cat) 3 Chemical Vapor Deposition process

Author: Knoesen, D ; Arendse, C ; Halindintwali, S ; Muller, T Date: Jan 2008 One of the prime components of a hot-wire (Cat) Chemical Vapor Deposition system is the filament used to pyro-catalytically crack the gases like silane. Burnt out tantalum filaments were studied to determine the possible improvement of lifetime ... Read more
Structural evolution of a Ta-filament during hot-wire chemical vapour deposition of Silicon investigated by electron backscatter diffraction

Author: Oliphant, CJ ; Arendse, CJ ; Prins, SN ; Malgas, GF ; Knoesen, D Date: Mar 2012 In this study we investigate the structural changes of a burnt-out tantalum filament that was operated at typical hydrogenated nanocrystalline silicon synthesis conditions in our hot-wire chemical vapour deposition chamber. Scanning electron ... Read more

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Browsing Journal Articles by Subject "Tantalum"

Browsing Journal Articles by Subject "Tantalum"

Browse

All of ResearchSpace

This Collection

Quick Links

Legislation and compliance

General Enquiries

Social Connect